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Sébastien Kerdiles received the Ph.D degree in materials science from the University of Caen, France, in 2000. He worked two years as Process Engineer for X-ION, a start-up in Paris area, where he developed surface treatments using multi-charged ions beam. From 2002 to 2013, he worked for SOITEC group as a Research Staff Member first, then as Technology Development Manager, and finally as a SOI Process and Product Designer. During this period, he contributed to the industrialization of 200 & 300 mm SOI substrates manufacturing, including RF-SOI and FD-SOI. In 2013, Dr. Kerdilès joined CEA-LETI, where he is in charge of thermal treatments engineering. His research interests include LPCVD of dielectrics and semiconductors, advanced substrates development, and the investigation of pulsed laser annealing for various applications such as 3D integration and MEMS. He authored or co-authored more than 50 journal articles and conference papers, a book chapter, and holds over 20 patents.
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Damiano Ricciarelli,Jonas Müller,Guilhem Larrieu,Ioannis Deretzis,Gaetano Calogero, Enrico Martello,Giuseppe Fisicaro,Jean-Michel Hartmann,Sébastien Kerdilès, Mathieu Opprecht,Antonio Massimiliano Mio, Richard Daubriac,
arxiv(2024)
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2023 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, IITC AND IEEE MATERIALS FOR ADVANCED METALLIZATION CONFERENCE, MAM, IITC/MAMpp.1-3, (2023)
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Advanced Materials Technologiesno. 9 (2023)
D. Montero,D. Caudevilla,S. Algaidy, R. Garcia-Hernansanz, A. Suler,P. Acosta-Alba,S. Kerdiles,D. Pastor,E. Garcia-Hemme, F. Roy, J. Olea
2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)pp.1-1, (2023)
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2023 Conference on Lasers and Electro-Optics (CLEO)pp.1-2, (2023)
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