基本信息
浏览量:7
职业迁徙
个人简介
Dr. Dammel is the author of over 200 scientific papers in chemistry and microlithography and an inventor on over 100 patent families in the field. His monograph “Diazonaphthoquinone-based Resists” is generally recognized as the definitive book on the subject. Dr. Dammel is an Associate Editor of the Journal of Micro/Nanolithography, Microfabrication, and Microsystems (JM3). In 2009, Dr.Dammel was elected to the position of Fellow by the International Society for Optical Engineering (SPIE). In 2011, Dr. Dammel received the Photopolymer Science and Technology Award of the Japanese Photopolymer Society, and in 2015, he won SPIE's Frits Zernike award.
Specialties: General lithographic materials, photoresists, chemcial amplification, diazonaphthoquinones, antireflective coatings, shrink coatings, LWR reduction, FPD photoresists, optical overcoats, spin-on dielectrics, immersion lithography, Directed Self Assembly (DSA), novel carbon materials: CNTs, GNRs, graphene, GO, other 2D materials.
研究兴趣
论文共 294 篇作者统计合作学者相似作者
按年份排序按引用量排序主题筛选期刊级别筛选合作者筛选合作机构筛选
时间
引用量
主题
期刊级别
合作者
合作机构
Ralph R. Dammel, David E. Speed
Advances in Patterning Materials and Processes XLI (2024)
Masato Suzuki, Youngjin Kim, Youngjun Her, Hengpeng Wu, Kun Si, Mark Marcello Maturi, Philipp Hans Fackler, Mansour Moinpour,Ralph Dammel,Yi Cao
ADVANCES IN PATTERNING MATERIALS AND PROCESSES XL (2023)
引用0浏览0引用
0
0
Carmen Popescu, Greg O'Callaghan, Alex McClelland,John Roth,Tom Lada,Takanori Kudo,Ralph Dammel, Mansour Moinpour,Yi Cao,Alex Philip Graham Robinson
Advances in Patterning Materials and Processes XXXVIII (2021): 125-134
https://doi.org/10.1117/12.2596403 (2021): 223-246
Carmen Popescu, Greg O'Callaghan, Alex McClelland,John Roth, Edward Jackson, Philipp H. Fackler,Ralph Dammel, Mansour Moinpour, Kun Si,Alex P. G. Robinson
International Conference on Extreme Ultraviolet Lithography 2021 (2021)
C. Popescu,G. O'Callaghan,A. McClelland,J. Roth, T. Lada,T. Kudo,R. Dammel, M. Moinpour, V Cow,A. P. G. Robinson
Journal of Photopolymer Science and Technologyno. 1 (2021): 75-80
mag(2015)
引用24浏览0引用
24
0
mag(2012)
引用22浏览0引用
22
0
加载更多
作者统计
合作学者
合作机构
D-Core
- 合作者
- 学生
- 导师
数据免责声明
页面数据均来自互联网公开来源、合作出版商和通过AI技术自动分析结果,我们不对页面数据的有效性、准确性、正确性、可靠性、完整性和及时性做出任何承诺和保证。若有疑问,可以通过电子邮件方式联系我们:report@aminer.cn