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排名必读论文期刊顶会热点AI 简史溯源树小脉星探人才迁徙塔尖人才国防情报追踪开源工具智慧手语
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论文共 17 篇作者统计合作学者相似作者

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Accurate Etch Modeling With Massive Metrology And Deep-Learning Technology
Yifei Lu,Yuhang Zhao,Ming Li,Wei Yuan,Xiang Peng,Hongmei Hu,Shuxin Yao, Zhunhua Liu,Yu Tian,Ying Gao, Bingyang Pan, Weijun Wang,
OPTICAL MICROLITHOGRAPHY XXXIII (2021)
引用2浏览0引用
2
0
Stochastic Defect Criticality Prediction Enabled By Physical Stochastic Modeling And Massive Metrology
Changan Wang,Peigen Cao, Maxence Delorme,Jen-Yi Wuu, Jiyou Fu,Fuming Wang, Bob Lin,Yiqiong Zhao, Yi-Hsing Peng,Yongfa Fan,Mu Feng, Bin Cheng,
EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY XII (2021)
引用2浏览0引用
2
0
Compact modeling of negative tone development resist with photo decomposable quencher
Ao Chen, Kar Kit Koh, Yee Mei Foong, Bradley Morgenfeld,Jun Chen, Sandra Lee, Xi Chen, Hesham Omar,Mu Feng,ChangAn Wang, Keith Gronlund,Jun Lang,
Proceedings of SPIE (2019)
引用0浏览0引用
0
0
Massive metrology using fast e-beam technology improves OPC model accuracy by >2x at faster turnaround time
Qian Zhao,Lei Wang, Jazer Wang,ChangAn Wang, Hong-Fei Shi, James Guerrero,Mu Feng,Qiang Zhang, Jiao Liang, Yunbo Guo,Chen Zhang, Tom Wallow,
Proceedings of SPIE (2018)
引用3浏览0引用
3
0
Resist Profile Aware Source Mask Optimization
Ao Chen, Yee Mei Foong, Michael Hsieh, Andrew Khoh,Stephen Hsu,Mu Feng,Jianhong Qiu, Chris Aquino
DESIGN-PROCESS-TECHNOLOGY CO-OPTIMIZATION FOR MANUFACTURABILITY VIII (2014)
引用1浏览0引用
1
0
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