基本信息
浏览量:45
职业迁徙
个人简介
The most successful patents: Three patents related to ellipsometric porosimetry
(EP). The EP system is presently under industrial production by Company “Semilab”
and it is a standard system for evaluation of nanoporous low-k films developed for
nanoelectronics. Four (4) patents related to damage free cryogenic etching that
allowed to achieve the lowest integrated k-value in ultralow-k materials.
Research Fields
PLASMA APPLICATIONSOL-GEL CHEMISTRY; AEROGELS; HYBRID MATERIALS; POROUS MATERIALS, NANOTECHNOLOGY, BIOTECHNOLOGYSOL-GEL PROCESS, NANOSTRUCTURED SURFACES, MATERIALS ENGINEERING, SCIENCE OF MATERIALS, MATERIAL CHARACTERIZATION, ENVIRONMENTAL ENGINEERINGSURFACE CHEMISTRY, FUNCTIONAL THIN FILM, SELF-ASSEMBLY
研究兴趣
论文共 441 篇作者统计合作学者相似作者
按年份排序按引用量排序主题筛选期刊级别筛选合作者筛选合作机构筛选
时间
引用量
主题
期刊级别
合作者
合作机构
Alexey N. Ryabinkin,Alexey S. Vishnevskiy,Sergej Naumov, Alexander O. Serov,Konstantin I. Maslakov,Dmitry S. Seregin,Dmitry A. Vorotyntsev, Alexander F. Pal,Tatyana V. Rakhimova,Konstantin A. Vorotilov,Mikhail R. Baklanov
PLASMA PROCESSES AND POLYMERS (2024)
Alexey S. Vishnevskiy,Dmitry S. Seregin,Alexander P. Palov,Georgy A. Orlov, Vladislav A. Yakushev, Ivan S. Ovchinnikov,Konstantin A. Vorotilov,Mikhail R. Baklanov
Microporous and Mesoporous Materials (2024): 112783-112783
Nanomaterials (Basel, Switzerland)no. 8 (2023): 1419-1419
PLASMA PROCESSES AND POLYMERSno. 4 (2023)
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY Ano. 5 (2023)
引用1浏览0引用
1
0
Md Rasadujjaman,Jinming Zhang,Dmitry A. Spassky,Sergej Naumov,Alexey S. Vishnevskiy, Konstantin A. Vorotilov,Jiang Yan,Jing Zhang,Mikhail R. Baklanov
crossref(2023)
加载更多
作者统计
合作学者
合作机构
D-Core
- 合作者
- 学生
- 导师
数据免责声明
页面数据均来自互联网公开来源、合作出版商和通过AI技术自动分析结果,我们不对页面数据的有效性、准确性、正确性、可靠性、完整性和及时性做出任何承诺和保证。若有疑问,可以通过电子邮件方式联系我们:report@aminer.cn