liang liuASML Brion Technol Shenzhen关注立即认领分享关注立即认领分享基本信息浏览量:0职业迁徙个人简介暂无内容研究兴趣论文共 3 篇作者统计合作学者相似作者按年份排序按引用量排序主题筛选期刊级别筛选合作者筛选合作机构筛选时间引用量主题期刊级别合作者合作机构Accurate Etch Modeling With Massive Metrology And Deep-Learning TechnologyYifei Lu,Yuhang Zhao,Ming Li,Wei Yuan,Xiang Peng,Hongmei Hu,Shuxin Yao, Zhunhua Liu,Yu Tian,Ying Gao, Bingyang Pan, Weijun Wang,OPTICAL MICROLITHOGRAPHY XXXIII (2021)引用2浏览0引用20Metrology and Deep Learning Integrated Solution to Drive OPC Model Accuracy ImprovementWei Yuan,Yifei Lu,Yuhang Zhao,Shoumian Chen,Ming Li,Hongmei Hu,Shuxin Yao, Zhunhua Liu, Qiaoqiao Li,Yu Tian, Zhiquan Zhou, Lirong Gu,Proceedings of SPIE (2019)引用6浏览0引用60Optimizing OPC data sampling based on orthogonal vector spaceYuyang Sun, Yee Mei Foong,Yingfang Wang,Jacky Cheng,Dongqing Zhang,Shaowen Gao,Nanshu Chen,Byoung Il Choi,Antoine J Bruguier,Mu Feng,Jianhong Qiu,Stefan Hunsche,Proceedings of SPIE(2011)引用14浏览0引用140作者统计合作学者合作机构D-Core合作者学生导师暂无相似学者,你可以通过学者研究领域进行搜索筛选数据免责声明页面数据均来自互联网公开来源、合作出版商和通过AI技术自动分析结果,我们不对页面数据的有效性、准确性、正确性、可靠性、完整性和及时性做出任何承诺和保证。若有疑问,可以通过电子邮件方式联系我们:report@aminer.cn