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个人简介
Kazuhiko Endo (M'00) received the Ph.D. degree in electrical engineering from Waseda University, Tokyo, Japan, in 1999.
He is a Researcher with the Silicon Nanoscale Devices Group, Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), Ibakari, Japan. Prior to joining AIST, he was with Silicon Systems Research Laboratories, NEC Corporation from 1993 to 2003 where he worked on the research and development of multilevel interconnection of ULSI, high-k gate stack technologies, and magnetic RAM manufacturing technologies. From August 1999 to August 2000 he was a Visiting Scholar at the Center for Integrated Systems, Stanford University, Stanford, CA, where he worked on the thermal effects in Cu interconnects. His research interests include nanometer-scale manufacturing for high-performance and low-power ULSI. He also works on exploratory high-performance interconnects. Additionally, his research extends to aggressively scaled double-gate transistors in advanced VLSI technologies. He has published over 30 research papers in archival journals and refereed international conferences on these subjects. He has over 20 US patents.
Dr. Endo has served on the technical program committees of the Material Research Society. He is a member of the IEEE Electron Devices Society, and the Japan Society of Applied Physics. He is the recipient of a Best Paper Award at the 2003 Advanced Metallization Conference, and at the 1998 Meeting of Japan Society of Applied Physics.
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2023 7TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE, EDTMpp.1-3, (2023)
Daisuke Ohori, Takahiro Ishihara,Xuelun Wang,Kazuhiko Endo,Tsou-Hwa Hsieh,Yiming Li, Nobuhiro Natori,Kazuma Matsui,Seiji Samukawa
Nanotechnologyno. 36 (2023): 365302-365302
Takahiro Ishihara,Daisuke Ohori,Xuelun Wang,Kazuhiko Endo, Nobuhiro Natori,Daisuke Sato,Yiming Li,Seiji Samukawa
2022 IEEE 22nd International Conference on Nanotechnology (NANO)pp.48-51, (2022)
Journal of Vacuum Science & Technology Ano. 2 (2022): 022405-022405
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