Gabriel Vanko

Gabriel Vanko has been a member of the Department of Microelectronic Structures at the Institute of Electrical Engineering of the Slovak Academy of Sciences since 2003. His research activities are directed to the field of study of complex technology and properties of advanced Micro(Nano)ElectroMechanical Devices based on III-N semiconductor heterostructures. 1. Hybrid integration of GaN with nano/micro-crystalline diamond films 2. Investigation of mechanical stresses in thin films and micromechanical structures 3. Piezoelectric sensors 4. Thermally stable (Schottky and ohmic) contacts for GaN based high electron mobility transistors (HEMTs) 5. Laser ablation