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排名必读论文期刊顶会热点AI 简史溯源树小脉星探人才迁徙塔尖人才国防情报追踪开源工具智慧手语
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论文共 42 篇作者统计合作学者相似作者

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Qualification Of Small Alignment Mark By On-Product Overlay Performance
Jigang Ma, Frans Bijnen, Edo Hulsebos,Lukasz Macht, Sotirios Tsiachris, Jin Dai, Rob Van Der Meulen, Miao Yu, Paul Bocker,Jung-Hwan Kim, Hyun Kim, Gwang-Gon Kim,
OPTICAL MICROLITHOGRAPHY XXXIV (2021)
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Statistical process optimization method for metrology equipment
Dongsoo Kim, Moran Zaberchik,Chen Li, Honggoo Lee,Chanha Park,Sang Ho Lee,Dongyoung Lee, Scott Beatty, Jae Young Park, Ramkumar Karur-Shanmugam, Telly Koffas,Dohwa Lee,
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV (2021): 488-494
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Edge placement error wafer mapping and investigation for improvement in advanced DRAM node
Kuan-Ming Chen, Wolfgang Henke, Ji-Hoon Jung, Ewa Kasperkiewicz, Anita Bouma, Rizvi Rahman, Gratiela Isai, Gwang-Gon Kim, Sotirios Tsiachris, Jae-Doug Yoo, Yuna Park, JaeYoung Park,
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV (2021): 453-463
引用2浏览0引用
2
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Holistic Alignment Approach For On-Product Overlay Improvement On Duv Lithography Process With Combined Solutions
Jigang Ma, Miao Yu,Cees Lambregts, Sotirios Tsiachris, Paul Bocker,Jun-Yeob Kim, Won-Kwang Ma,Sang-Jun Han,Chan-Ha Park, Kyong-Seok Kim,Jung-Hwan Kim, Sang-Jun Park,
OPTICAL MICROLITHOGRAPHY XXXIII (2021)
引用1浏览0引用
1
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Enhancing Model Accuracy And Calibration Efficiency With Image Based Pattern Selection Using Machine Learning Techniques
Ren-Cheng Sun, Dae-Kwon Kang, Chester Jia,Meng Liu, De-Bao Shao,Young-Seok Kim, Jangho Shin,Simmons Mark,Qian Zhao,Mu Feng,Yiqiong Zhao, Shibing Wang,
OPTICAL MICROLITHOGRAPHY XXXIV (2021)
引用2浏览0引用
2
0
Memory OPO improvement using novel target design
Eitan Hajaj, Honggoo Lee,Chanha Park,Sang-Ho Lee,Dongyoung Lee,Dohwa Lee,Dongsoo Kim,Sanghuck Jeon, Dongsub Choi, Eltsafon Ashwal,Chen Dror, Raviv Yohanan,
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV (2021): 1161137
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Measuring after-etch overlay and characterizing tilt fingerprints in multi-tier 3D-NAND structures
Hong-Goo Lee,Dong-Young Lee,Jun-Yeob Kim,Sang-Jun Han,Chan-Ha Park,Jaap Karssenberg, Mir Shahrjerdy, Arno van Leest, Nang-Lyeom Oh, Dong-Hak Lee, Aileen Soco, Tjitte Nooitgedagt
Proceedings of SPIE (2019): 23-30
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