a witvrouw

Ann Witvrouw (M'05) received the M.S. degree in metallurgical engineering from the Katholieke Universiteit Leuven, Leuven, Belgium, in 1986 and the M.S. and Ph.D. degrees in applied physics from Harvard University, Cambridge, MA, in 1987 and 1992, respectively. Since 1992, she has been with IMEC, Leuven, where she worked on the reliability of metal interconnects until the end of 1998. During this time, her research was focused on the mechanical stress in films and lines, electromigration, and stress-induced voiding. In 1998, she switched to research in microelectromechanical systems, focusing on advanced microelectromechanical system (MEMS) process technologies. Since 2000, she has been working on MEMS integration, first as a Team Leader, then as a Program Manager, and currently as a Principal Scientist. She has been the Coordinator of the Information Society Technologies projects SUMICAP and SiGeM and of several industrial projects in the area of MEMS integration. She is currently leading the Flemish SBO project Gemini.