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论文共 119 篇作者统计合作学者相似作者

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PLASMA PARAMETERS AND FLUORINE ATOM DENSITY IN SF6
A. V. Miakonkikh,V. O. Kuzmenko,A. M. Efremov,K. V. Rudenko
IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII KHIMIYA I KHIMICHESKAYA TEKHNOLOGIYAno. 3 (2025): 42-49
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Study of ALD-Deposited TaN Properties
A. Miakonkikh, Yu. Chesnokov, R. Gaidukasov,V. Kuzmenko
Russian Microelectronicsno. 6 (2025): 625-633
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THE FORMATION OF MICRONEEDLES STRUCTURES FROM SILICON USING PLASMA ETCHING IN SF6/O2 MIXTURE IN INDUCTIVELY COUPLED PLASMA
Vitaly Kuzmenko,Andrey Miakonkikh,Konstantin Rudenko
CONTRIBUTED PAPERS &amp ABSTRACTS of INVITED LECTURES, TOPICAL INVITED LECTURES and PROGRESS REPORTS 32nd SUMMER School and International Symposium on the Physics of Ionized Gasespp.134-134, (2024)
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Proton Damage Effects in Double Polymorph Γ/β-Ga2o3 Diodes
Alexander Y. Polyakov,Anton A. Vasilev, Anastasiia I. Kochkova,Ivan V. Shchemerov,Eugene B. Yakimov,Andrej V. Miakonkikh, Alexei V. Chernykh,Petr B. Lagov, Yrii S. Pavlov,A. S. Doroshkevich, R. Sh. Isaev, Andrei A. Romanov, Luiza A. Alexanyan, Nikolai Matros,Alexander Azarov,Andrej Kuznetsov,Stephen Pearton
JOURNAL OF MATERIALS CHEMISTRY Cno. 3 (2024): 1020-1029
引用5浏览0引用
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Revealing the Controlling Mechanisms of Atomic Layer Etching for High-K Dielectrics in Conventional Inductively Coupled Plasma Etching Tool
Vitaly Kuzmenko, Alexander Melnikov, Alexandr Isaev,Andrey Miakonkikh
Journal of Vacuum Science & Technology A Vacuum Surfaces and Filmsno. 5 (2024)
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作者统计

#Papers: 119

#Citation: 397

H-Index: 10

G-Index: 14

Sociability: 6

Diversity: 2

Activity: 25

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